BROOKS 5861E
 
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5861E: Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer Seals

The Brooks Model 5861E elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

流量范圍：10slpm-100slpm     精度：1% FS     較大壓力：100bar     1500psig   溫度：65℃  150F       信號：0-5V